Document Type and Number:
Japanese Patent JPH02110984
Kind Code:
U
More Like This:
Application Number:
JP1696589U
Publication Date:
September 05, 1990
Filing Date:
February 16, 1989
Export Citation:
International Classes:
G11B19/20; H02K29/00; (IPC1-7): H02K29/00; G11B19/20
Previous Patent: JPH02110983
Next Patent: METHOD AND DEVICE FOR CORRECTING OPTICAL AXIS IN NARROW BAND OSCILLATION EXIMER LASER DEVICE
Next Patent: METHOD AND DEVICE FOR CORRECTING OPTICAL AXIS IN NARROW BAND OSCILLATION EXIMER LASER DEVICE