Document Type and Number:
Japanese Patent JPH0232682
Kind Code:
Y2
Application Number:
JP8162487U
Publication Date:
September 04, 1990
Filing Date:
May 27, 1987
Export Citation:
International Classes:
C23C8/20; C23F17/00; (IPC1-7): C23C8/20; C23F17/00
Next Patent: JPH0232683