Document Type and Number:
Japanese Patent JPH0246366
Kind Code:
B2
Abstract:
In a method of forming a video disc or a digital sound recording disc for example, a uniform layer of a predetermined thickness has to be applied to a substrate, and according to the invention, the layer material is applied in the form of a liquid with a known viscosity and the disc is rotated at a first velocity to spread the liquid and then the disc is rotated at a higher velocity to dry the liquid at least partly, to be in the form of a coating having a thickness which is dependent upon the viscosity of the liquid and the higher velocity at which the substrate is rotated. The method may be used is preparing a glass or other substrate for the application of a photoresist layer, or it may be used in the application of the photoresist layer, or in the application of a developer for developing an exposed photoresist layer.
Inventors:
RICHAADO ERU UIRUKINSON
Application Number:
JP14698580A
Publication Date:
October 15, 1990
Filing Date:
October 22, 1980
Export Citation:
Assignee:
DISCOVISION ASS
International Classes:
G03C11/00; B29C33/00; B29C61/00; B29D17/00; G03F7/16; G03F7/30; G03F7/40; G11B3/70; G11B7/0045; G11B7/26; G11B9/06