Title:
【発明の名称】チップ洗浄装置
Document Type and Number:
Japanese Patent JPH04501891
Kind Code:
A
Inventors:
Lundgren, El Bartosar
Application Number:
JP51172989A
Publication Date:
April 02, 1992
Filing Date:
November 20, 1989
Export Citation:
Assignee:
Syundos Defibrator Industries Actie Evorague
International Classes:
B03B5/00; B03B5/62; D21B1/02; D21C1/00; D21C1/02; (IPC1-7): B03B5/62; D21B1/02; D21C1/00
Attorney, Agent or Firm:
Yoshio Kawaguchi (4 outside)