Document Type and Number:
Japanese Patent JPS5046486
Kind Code:
A
Application Number:
JP9729073A
Publication Date:
April 25, 1975
Filing Date:
August 31, 1973
Export Citation:
International Classes:
H01L21/00; (IPC1-7): H01L21/00
Domestic Patent References:
| JPS513744U | 1976-01-12 |