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Patent Searching and Data

Document Type and Number:
Japanese Patent JPS5080083
Kind Code:
Application Number:
Publication Date:
June 28, 1975
Filing Date:
November 12, 1973
Export Citation:
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International Classes:
G03C1/74; B05B13/00; B05D1/00; B05D1/02; C23F1/00; G03F7/16; G03F9/00; H01L21/027; H01L21/312; H05K3/06; (IPC1-7): B05D1/00; C23F1/00; G03F9/00; H01L21/312; H05K3/06

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