Document Type and Number:
Japanese Patent JPS5182570
Kind Code:
A
More Like This:
| JPS59222937 | MANUFACTURE OF SEMICONDUCTOR DEVICE |
Inventors:
TOKUMARU SEIYA
NAKAI MASANORI
NAKAMURA JUNICHI
ITO SHINTARO
SHINOZAKI SATOSHI
NISHI YOSHIO
NAKAI MASANORI
NAKAMURA JUNICHI
ITO SHINTARO
SHINOZAKI SATOSHI
NISHI YOSHIO
Application Number:
JP190875A
Publication Date:
July 20, 1976
Filing Date:
December 27, 1974
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L29/73; H01L21/331; H01L29/08; (IPC1-7): H01L29/08
Domestic Patent References:
| JPS462112A |
Foreign References:
| US3328214A | 1967-06-27 | |||
| US3411051A | 1968-11-12 |