Document Type and Number:
Japanese Patent JPS5192627
Kind Code:
A
Application Number:
JP1835175A
Publication Date:
August 13, 1976
Filing Date:
February 13, 1975
Export Citation:
International Classes:
G03G5/08; G03G5/05; G03G5/087; H01L31/00; H01L51/42; (IPC1-7): G03G5/05; G03G5/087; H01L31/00
Domestic Patent References:
JPS4847343A | 1973-07-05 | |||
JPS4834186A | 1973-05-16 | |||
JPS4826779A | 1973-04-09 | |||
JPS482966A | ||||
JP43016195A | ||||
JPS497016A | 1974-01-22 |
Foreign References:
US3025160A | 1962-03-13 |