Document Type and Number:
Japanese Patent JPS5444685
Kind Code:
U
Application Number:
JP6067778U
Publication Date:
March 27, 1979
Filing Date:
May 04, 1978
Export Citation:
International Classes:
H01L29/73; H01L21/331; H01L29/06; H01L29/72; (IPC1-7): H01L29/06; H01L29/72
Domestic Patent References:
| JP44026569A | ||||
| JP40012739A |