Document Type and Number:
Japanese Patent JPS5562056
Kind Code:
U
Application Number:
JP14220478U
Publication Date:
April 26, 1980
Filing Date:
October 18, 1978
Export Citation:
International Classes:
H01L29/73; H01L21/331; H01L29/08; H01L29/72; (IPC1-7): H01L29/72; H01L29/08