Document Type and Number:
Japanese Patent JPS5562058
Kind Code:
U
Application Number:
JP14452578U
Publication Date:
April 26, 1980
Filing Date:
October 18, 1978
Export Citation:
International Classes:
G11C27/04; H01L21/339; H01L29/76; H01L29/762; H01L29/78; (IPC1-7): H01L29/78