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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS57112455
Kind Code:
U
Application Number:
JP19140580U
Publication Date:
July 12, 1982
Filing Date:
December 27, 1980
Export Citation:
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International Classes:
H01J37/09; H01J37/147; H01J37/305; H01L21/027; H01L21/30; (IPC1-7): H01J37/147; H01J37/09; H01J37/305; H01L21/30
Domestic Patent References:
JP53064559B
JPS3814165Y1



 
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