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Patent Searching and Data

Document Type and Number:
Japanese Patent JPS5722423
Kind Code:
Application Number:
Publication Date:
May 13, 1982
Filing Date:
March 31, 1977
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International Classes:
G11C11/411; H01L21/82; H01L21/8226; H01L27/082; H01L27/102; H03K19/091

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