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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5823930
Kind Code:
B2
Inventors:
SHIROTA KOHEI
Application Number:
JP12714475A
Publication Date:
May 18, 1983
Filing Date:
October 22, 1975
Export Citation:
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Assignee:
NIPPON ELECTRON OPTICS LAB
International Classes:
H01L21/027; H01L21/302; H01L21/68