Document Type and Number:
Japanese Patent JPS61146977
Kind Code:
U
Application Number:
JP3042485U
Publication Date:
September 10, 1986
Filing Date:
March 04, 1985
Export Citation:
International Classes:
H05K1/18; H01L21/52; H01L21/58; H05K3/32; (IPC1-7): H05K1/18; H01L21/58; H05K3/32