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Patent Searching and Data

Document Type and Number:
Japanese Patent JPS62162256
Kind Code:
Application Number:
Publication Date:
October 15, 1987
Filing Date:
March 31, 1986
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International Classes:
C23C14/24; C23C14/34; C23C14/56; C23C16/50; C23C16/54; (IPC1-7): C23C14/56; C23C14/24; C23C14/34; C23C16/50; C23C16/54

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