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Patent Searching and Data

Document Type and Number:
Japanese Patent JPS63146873
Kind Code:
Application Number:
Publication Date:
September 28, 1988
Filing Date:
March 18, 1987
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International Classes:
G01F23/292; G01F23/28; G01V8/12; G01V9/00; G03G21/00; G03G21/10; H01L31/12; (IPC1-7): G03G21/00; G01F23/28; G01V9/00; H01L31/12

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