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Patent Searching and Data


Title:
研磨パッド及びその製造方法並びに研磨パッド用クッション層
Document Type and Number:
Japanese Patent JPWO2002043921
Kind Code:
A
Inventors:
Tetsuo Shimomura
Masahiko Nakamori
堤 Masayuki
Koichi Ono
Takatoshi Yamada
Shigeru Komai
Application Number:
JP2001010363W
Publication Date:
June 06, 2002
Filing Date:
November 28, 2001
Export Citation:
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Assignee:
Toyobo Co., Ltd.
International Classes:
(IPC1-7): B24B37/00; H01L21/304; C08J5/14; C08J7/00; B24D11/00
Attorney, Agent or Firm:
Yuzo Ozaki
Koichi Kajisaki
Toshihiko Taniguchi
Takao Suzuki