Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
研磨剤及び基板の研磨方法
Document Type and Number:
Japanese Patent JPWO2002067309
Kind Code:
A
Inventors:
Yoshida Masato
Naoyuki Koyama
Yoichi Machii
Masaya Nishiyama
Application Number:
JP2002001483W
Publication Date:
August 29, 2002
Filing Date:
February 20, 2002
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
(IPC1-7): H01L21/304; B24B37/00; C09K3/14
Attorney, Agent or Firm:
Hidekazu Miyoshi