Title:
NANOIMPRINT METHOD AND APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/020963
Kind Code:
A1
Abstract:
Provided is a nanoimprint method for transferring a pattern by bringing a mold
and an object into contact and by pressing them. The nanoimprint method comprises
the step of preparing a transfer layer having a first fitting structure and a mold
having a second fitting structure formed to fit the first fitting structure,
the step of bringing the transfer layer and the mold into contact so that the first
fitting structure and the second fitting structure may fit each other, and the
step of applying, subsequent to the contacting step, a pressure to the contacting
faces of the mold and the transfer layer thereby to transfer the pattern of the
mold to the transfer layer.
Inventors:
NAKAMURA KAZUYA (JP)
IMAIZUMI NOBUO (JP)
HIYAMA YOSHIHITO (JP)
MAEDA RYUTARO (JP)
GOTO HIROSHI (JP)
IMAIZUMI NOBUO (JP)
HIYAMA YOSHIHITO (JP)
MAEDA RYUTARO (JP)
GOTO HIROSHI (JP)
Application Number:
PCT/JP2006/316145
Publication Date:
February 22, 2007
Filing Date:
August 17, 2006
Export Citation:
Assignee:
NAMIKI PRECISION JEWEL CO LTD (JP)
NAKAMURA KAZUYA (JP)
IMAIZUMI NOBUO (JP)
HIYAMA YOSHIHITO (JP)
MAEDA RYUTARO (JP)
GOTO HIROSHI (JP)
NAKAMURA KAZUYA (JP)
IMAIZUMI NOBUO (JP)
HIYAMA YOSHIHITO (JP)
MAEDA RYUTARO (JP)
GOTO HIROSHI (JP)
International Classes:
B82B3/00; B29C33/38; B29C59/04; B81C99/00; B82B1/00; H01L21/027; H05K3/10
Foreign References:
| JP2000147229A | 2000-05-26 | |||
| JPH04135888A | 1992-05-11 | |||
| JP2000141481A | 2000-05-23 | |||
| JPH0944762A | 1997-02-14 | |||
| JP2005003687A | 2005-01-06 |
Other References:
TAN H. ET AL.: "Roller nanoimprint lithography", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B, AMERICAN VACUUM SOCIETY, vol. 16, no. 6, 1998, pages 3926 - 3928, XP012007312
Attorney, Agent or Firm:
NAMIKI SEIMITSU HOUSEKI KABUSHIKIKAISHA (Shinden 3-Chome Adachi-ku Tokyo, 11, JP)
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