Title:
（アミドアミノアルカン）金属化合物、及び当該金属化合物を用いた金属含有薄膜の製造方法
Document Type and Number:
Japanese Patent JPWO2012060428
Kind Code:
A
Inventors:
Toson 整
Hiroki Kaneto
Masashi Shirai
Hiroshi Nihei
Hiroki Kaneto
Masashi Shirai
Hiroshi Nihei
Application Number:
JP2011075347W
Publication Date:
May 12, 2014
Filing Date:
November 02, 2011
Export Citation:
Assignee:
Ube Industries, Ltd.
International Classes:
C07F1/04; C23C16/40; C07F15/02; C07F3/02; C07F13/00; C07F5/00; C07F15/06; C07F3/06; C23C16/18; C07F15/04
Attorney, Agent or Firm:
Katsuhiro Ito
Akiko Ono
Akiko Ono