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Patent Searching and Data


Title:
ANTI-STATIC COUNTERMEASURE OF DICE ON STAGE
Document Type and Number:
Japanese Patent JPS6417442
Kind Code:
A
Abstract:

PURPOSE: To prevent static electricity from being generated, by spraying a gas between an adhesive tape and a stage and forming a space between the adhesive tape and the stage and moving the adhesive tape and the stage relatively.

CONSTITUTION: A dice 1a is fixed with a ring 3 by the use of an adhesive tape 2, and it is made movable on a stage 11 in order to observe a surface of the dice 1a and to perform electrical inspection of the dice. Then a gas 12 is sprayed from the lower side of the tape 2 so as to form a space between the tape 2 and the stage 11 before scraping the tape 2 and the stage 11 together, and next the tape 2 or the stage 11 is moved. Hence, static electricity, which breaks the dice of a semiconductor integrated circuit, can be prevented from being generated.


Inventors:
ONARI KATSUMI
Application Number:
JP17282287A
Publication Date:
January 20, 1989
Filing Date:
July 13, 1987
Export Citation:
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Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L21/67; H01L21/68; H05F3/00; (IPC1-7): H01L21/68; H05F3/00
Attorney, Agent or Firm:
Shimizu Mamoru