Title:
ANTICORROSIVE SURFACE TREATMENT OF METAL
Document Type and Number:
Japanese Patent JPH0238584
Kind Code:
A
Abstract:
PURPOSE: To improve the reliability of a thin Al film by electrolytically treating Al or an alloy thereof in an inorg. and/or org. acid salt soln. contg. an org. chelating agent.
CONSTITUTION: Al or an alloy thereof is electrolytically treated in an inorg. and/or org. acid salt soln. contg. an org. chelating agent to form a chelate-contg. coating film. The electrolytic treatment is preferably carried out at 40-100°C temp. of the soln. Fe, Co, Ni or an alloy thereof may be treated in the same way. The reliability of a thin Al film can be improved.
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Inventors:
MUROFUSHI EMIKO
KOBAYASHI SHIRO
ITO MASAHIKO
KOBAYASHI SHIRO
ITO MASAHIKO
Application Number:
JP18885688A
Publication Date:
February 07, 1990
Filing Date:
July 28, 1988
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C23C22/56; C23C22/68; C25D9/12; C25D11/06; C25D11/16; C25D11/36; C25D11/38; G11B7/24; C25D11/18; G11B7/258; G11B7/26; H01G9/00; H01G9/04; (IPC1-7): C23C22/68; C25D9/12; C25D11/18; C25D11/36; C25D11/38; G11B7/26; H01G9/04; H01L21/316
Domestic Patent References:
| JPS61284598A | 1986-12-15 | |||
| JPS6280294A | 1987-04-13 | |||
| JPS60224797A | 1985-11-09 | |||
| JPS51117937A | 1976-10-16 | |||
| JPS5190942A | 1976-08-10 | |||
| JPS53108045A | 1978-09-20 | |||
| JPS4868436A | 1973-09-18 | |||
| JPS50115138A | 1975-09-09 |
Attorney, Agent or Firm:
Tatsuyuki Unuma (1 outside)