To provide a low-cost apparatus for detoxifying a gas comprising chlorine trifluoride, exhibiting a high recovery rate for CaF2 without causing plugging in detoxifying a gas comprising chlorine trifluoride.
The apparatus for detoxifying a gas comprising chlorine trifluoride, including a dry-type detoxifying column filled with a solid alkali as a detoxifying agent and a wet-type detoxifying column comprising a liquid absorbent as a detoxifying agent, with the dry-type detoxifying column including an introduction port for introducing a gas comprising chlorine trifluoride and a discharge port for discharging the gas having been subjected to the dry-type detoxifying treatment and the wet-type detoxifying column including an introduction port for introducing the gas discharged from the discharge port of the dry-type detoxifying column and a discharge port for discharging the gas having been subjected to the wet-type detoxifying treatment, is characterized by including a means of detecting a fluorine component present in the gas discharged from the discharge port of the dry-type detoxifying column and an introduction pipe for introducing the gas discharged from the discharge port of the dry-type detoxifying column into the wet-type detoxifying column.
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