To provide an apparatus for forming a barrier film on the inner surface of a plastic container where a barrier film such as a carbon film of high film quality can be formed on the inner surface of a plastic container at a high speed.
The apparatus comprises a plurality of film formation chambers communicating with a rotary vacuum sealing mechanism through an exhaust pipe 11 to form a barrier film on the inner surface of a plastic container. The exhaust pipe is made of an electrically conductive material, and a honeycomb conductor 39 having gas permeability and electrical conductivity is arranged at the desired position at the inside thereof. Moreover, the film formation chamber is provided with: an external electrode having a cavity large enough to surround the container when the vessel is inserted; an electrically conductive chamber header member fixed to the end face of the external electrode on the side where the mouth part of the container is located through an insulating member and being connected with the exhaust pipe and earthed; a gas spouting member inserted into the container in the external electrode from the chamber header member side and blowing barrier film formation gas; and an electric field impartation means for imparting an electric field between the chamber header member earthed with the external electrode and the exhaust pipe.
ASAHARA YUJI
UEDA ATSUSHI
ISHISE FUMIHIKO
NAKACHI MASAAKI
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