Title:
アライメントステージ
Document Type and Number:
Japanese Patent JP7018193
Kind Code:
B2
Abstract:
To provide an alignment stage in which a feed mechanism is suitable for precise and fine movement, and which allows a large applied pressure when a workpiece is processed.SOLUTION: An alignment stage 1A includes a base 11, a table 12 arranged above the base 11, a work plate 13 which is supported by the table 12 and on which a workpiece W is placed, and a feed mechanism unit 3 which is provided between the base 11 and the table 12 and supports the table 12 so as to be movable with respect to the base 11 in three degrees of freedom in the X axis direction, the Y axis direction, and the θ rotation direction. In the alignment stage 1A, the table 12 is provided with an opening 121 facing the work plate 13 at the center, and a movement restricting body 2A inserted into the opening 121 of the table 12 and restricting the downward movement of the work plate 13 is provided between the work plate 13 and the base 11.SELECTED DRAWING: Figure 4
Inventors:
Kenji Mochizuki
Takanori Uchida
Nobuhiro Matsusaka
Takanori Uchida
Nobuhiro Matsusaka
Application Number:
JP2018027977A
Publication Date:
February 10, 2022
Filing Date:
February 20, 2018
Export Citation:
Assignee:
Aiseru Co., Ltd.
International Classes:
H01L21/68; H01L21/027; H01L21/683; (IPC1-7): E04B1/58; E04B1/19
Domestic Patent References:
| JP2007102198A | ||||
| JP2016186570A | ||||
| JP2017042841A |
Foreign References:
| CN106684025A |
Attorney, Agent or Firm:
Eiji Miyazaki
Tomohiro Harada
Tomohiro Harada