To provide a technology for preventing scattering of dust into a chamber from a free ball bearing, and for minimizing moving resistance of a receiving ball pressing ring for increasing rotational resistance of a main ball by pressing down a receiving ball by a non-grease system of using no grease.
The bearing unit, the free ball bearing 110, the support table, the carrying facility and the turntable are provided so that this free ball bearing 110 incorporated with the receiving ball pressing ring 50 having a ring-shaped pressing piece 55 for increasing the rotational resistance of the main ball 42 by pressing down the receiving ball 42 by being inserted between a semispherical concave surface 21 of a ball receiving part 23 of a body 20 and the main ball 42, is fixed to a baseplate 89a, and a rod 62 fixed to the receiving ball pressing ring 50 is moved, and a pressing driving deice 70 moving the receiving ball pressing ring 50 to a receiving ball pressing position from a standby position, is arranged on the reverse surface side of the baseplate 89a.
COPYRIGHT: (C)2011,JPO&INPIT
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
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