Title:
基板搬送装置
Document Type and Number:
Japanese Patent JP4724358
Kind Code:
B2
Inventors:
Toshiyuki Koizumi
Yukio Masuda
Xu Feng
Yukio Masuda
Xu Feng
Application Number:
JP2003138484A
Publication Date:
July 13, 2011
Filing Date:
May 16, 2003
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
B65G21/20; B65G49/06; B65G13/04; H01L21/677; H01L21/68
Domestic Patent References:
| JP11087210A | ||||
| JP8268519A | ||||
| JP2000001217A | ||||
| JP10265018A | ||||
| JP8177971A | ||||
| JP10072110A | ||||
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Attorney, Agent or Firm:
Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida
Masashi Yoshioka
Shinichi Abe
Yuji Tsujida
Masashi Yoshioka