Title:
BOARD TREATING APPARATUS
Document Type and Number:
Japanese Patent JP2008277479
Kind Code:
A
Abstract:
To provide a board treating apparatus capable of suppressing the occurrence of a scratch etc. on the rollers for supporting the lower end of a board when the board is treated while it is being transferred at a predetermined tilting angle.
In this treating apparatus 1 for treating the board 3 while transferring it, transferring rollers 4 for transferring the board 3 while supporting it at a predetermined angle, and lower end supporting rollers 5 for supporting the lower end of the board 3 transferred by the transferring rollers 4 are provided in a treatment chamber 2. The transferring rollers 4 are rotationally driven by a motor 8, thereby the lower end supporting roller 5 are rotated accompanying the transfer of the board 3.
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Inventors:
SASAKURA AKIRA
MORIE KENZO
MORIE KENZO
Application Number:
JP2007118136A
Publication Date:
November 13, 2008
Filing Date:
April 27, 2007
Export Citation:
Assignee:
SHARP KK
International Classes:
H01L21/677; B08B1/04; B65G13/02; B65G39/00; B65G49/06
Attorney, Agent or Firm:
Noboru Ueno
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