PURPOSE: To provide the method and device for a vacuum manufacturing device capable of easily maintaining the life prolongation of a sensor for a gas detector, the extension of the supplementary frequency of an electrolyte, etc.
CONSTITUTION: A break through detecting device is attached to a harmful object in exhaust gas eliminating device 1 for a vacuum manufacturing device, and is provided with a gas detector 5 for intermittently measuring at least a part of the treated gas from the harmful object eliminating device 1. Piping 6, 7 for sampling for leading the treated gas to the detector 5, and shut-off valves 8, 9 and a sampling pump 12 in the pipings are provided. A measuring controller for comparing a detected value by the gas detector and a previously set value and for indicating the opening and shutting of the shut-off valves and the interval of the sampling pump operation, or a device for measuring the service condition of the harmful object eliminating device 1 is disposed.
YASUHARA YOSHIHARU
EBARA RES CO LTD
EBARA CORP