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Title:
CARBON NANOTUBE, ITS MANUFACTURING METHOD, CARBON NANOTUBE DEVICE AND ELECTRICAL DOUBLE LAYER CAPACITOR
Document Type and Number:
Japanese Patent JP3854958
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide a uniform, high-density, large-area carbon nanotube which can be formed through an easy process and enables mass production, its manufacturing method and a carbon nanotube device and an electrical double layer capacitor using the same.
SOLUTION: An Al layer 2 essentially comprising Al and a catalyst metal layer 3 made of a catalyst metal are formed on a conductive substrate 1 made of a high-melting conductive material. As the conductive material, a high-melting metal having a melting point of ≥1,660°C or carbon can be used. A substrate 100 is set inside a vessel of a thermal CVD system, heated in vacuo by a heater and retained for a prescribed period of time so that catalyst particulates 5 are evenly dispersed on the conductive substrate 1 at a high density. Then, while the temperature of the substrate 100 is being retained, a carbon-containing gas is introduced into the vessel and retained for a prescribed period of time to perform thermal decomposition of the carbon-containing gas and form the carbon nanotube 6 on the catalyst particulates 5.


Inventors:
尾浦 憲治郎
平尾 孝
片山 光浩
本多 信一
遠藤 浩二
木本 衛
Application Number:
JP2003000384198
Publication Date:
December 06, 2006
Filing Date:
November 13, 2003
Export Citation:
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Assignee:
尾浦 憲治郎
三洋電機株式会社
International Classes:
B82B1/00; C01B31/02; B82Y30/00; B82Y99/00; H01G11/22; H01G11/36; H01G11/66; H01G11/68; H01G11/70; H01G11/86; (IPC1-7): C01B31/02; B82B1/00; H01G9/016; H01G9/058
Domestic Patent References:
JP2002338221A
JP2004107162A
JP2005032542A
JP2004026532A
JP11194134A
Foreign References:
Attorney, Agent or Firm:
福島 祥人