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Patent Searching and Data


Title:
CARRIER DEVICE
Document Type and Number:
Japanese Patent JP2000117671
Kind Code:
A
Abstract:

To carry a heavy article at a high speed by improving the stiffness of a device, and to enhance yield by preventing the generation of dust.

A pair of coupled first arms and a pair of second arms 2 (2a, 2b) are coupled by a third arm 3 in order to improve the stiffness of an overall link. A carrier 4 is connected to the arm 3. A rotating constraint mechanism is integrated into the arm 3 in order to prevent the generation of dust from the rotating constraint mechanism. The rotating constraint mechanism is covered with the arm 3, and a shaft 7 (7a, 7b) united with the rotating mechanism is put out of the arm 3. On the shaft (7a, 7b) penetrating the arm 3, a shaft seal 23 is provided between the arm 3 and the shaft 7 (7a, 7b) in order to prevent generated dust from going out from the inside of the arm 3.


Inventors:
MATSUMURA YASUHIDE
KANETOMO MASABUMI
MITSUSAKA KENJI
KAMAYA HIRONAO
SUGIYAMA KAZUICHI
Application Number:
JP28628798A
Publication Date:
April 25, 2000
Filing Date:
October 08, 1998
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
B65G1/00; B25J9/06; H01L21/677; H01L21/68; (IPC1-7): B25J9/06; B65G1/00; H01L21/68
Attorney, Agent or Firm:
Ogawa Katsuo