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Patent Searching and Data


Title:
CARRIER FOR HOLDING MATERIAL TO BE POLISHED
Document Type and Number:
Japanese Patent JP2006026760
Kind Code:
A
Abstract:

To provide a carrier for holding a material to be polished having excellent durability and wear resistance.

This carrier for holding the material to be polished is provided with a resin-made frame mounted on the inner edge part thereof, and has one or more holes for holding the material to be polished. In the carrier for holding the material to be polished, the surface of the carrier base material in a part made of metal is coated with material which is the same as the carrier base material or has a higher hardness.


Inventors:
NAGAYAMA HITOSHI
TANAKA HIROAKI
Application Number:
JP2004000205737
Publication Date:
February 02, 2006
Filing Date:
July 13, 2004
Export Citation:
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Assignee:
SPEEDFAM CO LTD
International Classes:
B24B37/27; B24B37/28; B24B41/06; H01L21/304
Domestic Patent References:
JP2001358095A2001-12-26
JPH0671556A1994-03-15
JP2002018707A2002-01-22
JPH0941199A1997-02-10
JPH10330123A1998-12-15
JPH1190817A1999-04-06
JP2001105303A2001-04-17
JP2000015565A2000-01-18
JPH0426117A1992-01-29
JPH11320359A1999-11-24
Foreign References:
WO2006001340A12006-01-05
Attorney, Agent or Firm:
田中 宏
樋口 榮四郎
宮本 晴視