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Patent Searching and Data


Title:
CHEMICALLY ETCHING SOLUTION FOR CRYSTALS OF 3-5 GROUP ELEMENT COMPOUNDS
Document Type and Number:
Japanese Patent JPS57135799
Kind Code:
A
Abstract:
PURPOSE:A chemically etching solution that is composed of an alkali salt of bichromic acid, hydrogen bromide and acetic acid or phosphoric acid, thus forming high-quality etched mirror surfaces regardless the orientation of the crystal of III-V group element compounds. CONSTITUTION:The objective etching solution is an aqueous solution containing three components, a) an alkali bichromate, b) hydrobromic acid and c) acetic or phosphoric acid. The solution is made from each aqueous solution. For example, the concentration of aqueous alkali bichromate is adjusted to 0.1N to saturation, hydrobromic acid is 9N, acetic acid is 17N and phosphoric acid is 15N and they are mixed. The volume ratio is (0.1-10):1:(0.1-100) in a:b:c. The use of the etching solution prevents the formation of etch pits.

Inventors:
ADACHI SADAO
KAWAGUCHI HITOSHI
Application Number:
JP1896281A
Publication Date:
August 21, 1982
Filing Date:
February 13, 1981
Export Citation:
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Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
C09K13/04; C30B33/00; C30B33/10; H01L21/306; H01L21/308; (IPC1-7): C09K13/04; C30B33/00; H01L21/306