Title:
【発明の名称】チップトリミング装置
Document Type and Number:
Japanese Patent JP2668065
Kind Code:
B2
Abstract:
PURPOSE:To efficiently produce a tip having an optimum top end shape by polishing the tip while observing the top end shape of the tip. CONSTITUTION:After the inside of a vacuum vessel 27 is evacuated, an inert gas such as gaseous argon or gaseous helium is introduced into a vacuum vessel 27. A high voltage is impressed between the tip 21 and a fluorescent screen 23 by a DC high voltage power source 24. Then, the inert gas near the top end of the tip 21 is ionized and the ions plunge into a screen 23 so that the screen emits light. Impact is applied to the top end of the tip 21 by high-velocity atomic rays 26 released from a fast atomic ray source 25 while the electric field ion microscopic image at the front end of the tip 21 is held projected on a fluorescent screen 23. The front end of the tip is thus etched little by little.
Inventors:
Kazutoshi Nagai
Application Number:
JP21164388A
Publication Date:
October 27, 1997
Filing Date:
August 26, 1988
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
G01B7/34; B23K17/00; G01B21/30; G01N37/00; G01Q40/00; G01Q60/10; G01Q60/16; H01J37/20; H01J37/31; (IPC1-7): G01B7/34; B23K17/00; G01B21/30; G01N37/00; H01J37/20; H01J37/31
Domestic Patent References:
| JP1287404A |
Attorney, Agent or Firm:
Toshio Takayama (1 person outside)