PURPOSE: To improve the precision of color extraction in mounted substrate inspection, to facilitate discrimination by colors, and to easily set a threshold value for color extraction even by an operator who does not have knowledge about colors.
CONSTITUTION: This device is provided with a CCD camera 1 which picks up an image of an object 3 to be inspected, a color coordinate converter 5 which converts the primary color signals of the colors into brightness 1 and chromaticity values cx and cy, a color extracting means 21 consisting of a combination of an LUT for binarizing the brightness 1, a 2D-LUT for binarizing the chromaticity values cx and cy being two-dimensional information, and an AND circuit 9, a table driving device 27 which moves a substrate table to a specific place so as to picks up the image of the object 3 to be inspected, and a table generation part 24 which generates a table for the binarization means of the color extracting means 21. Consequently, even when the color distribution of an object to be extracted is elliptic or in a special shape, precise color extraction is performed and the extraction threshold value is automatically determined.
IKURUMI KAZUHIRO
OKAMOTO KENJI
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