Title:
【発明の名称】カラーフィルタ
Document Type and Number:
Japanese Patent JP2000506996
Kind Code:
A
Abstract:
A substrate (typically a solid state imager or a liquid crystal display device) is provided with a filter by forming a layer of photoresist on the substrate, and exposing and developing the photoresist to produce filter elements from the portions of the layer of photoresist remaining after the development. After development of the layer of photoresist, the substrate is treated with a silylation compound capable of cross-linking the photoresist and of promoting adhesion of the photoresist to the substrate. A preferred silylation compound is hexamethylcyclotrisilizane.
Inventors:
Zuri, Karl A.
McLathy, John Yee.
Miller, Harris Earl.
McLathy, John Yee.
Miller, Harris Earl.
Application Number:
JP53266097A
Publication Date:
June 06, 2000
Filing Date:
March 04, 1997
Export Citation:
Assignee:
Polaroid Corporation
International Classes:
G03F7/004; G02B5/20; G03F7/00; G03F7/26; G03F7/38; G03F7/40; (IPC1-7): G03F7/38; G02B5/20; G03F7/004; G03F7/26
Attorney, Agent or Firm:
Shusaku Yamamoto