Title:
COMBUSTIBLE GAS DETECTING ELEMENT
Document Type and Number:
Japanese Patent JPS52146698
Kind Code:
A
Abstract:
PURPOSE: To favorably form the bridge and to make easy the same temperature condition, by sputtering N type and P type semiconductor on the same substrate in thin film.
Inventors:
ENDOU SHIYUUGO
AKIYAMA SHIGEO
NAKAJIMA JIYUN
AKIYAMA SHIGEO
NAKAJIMA JIYUN
Application Number:
JP6384276A
Publication Date:
December 06, 1977
Filing Date:
May 31, 1976
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01N27/12; H01L29/78; H01L49/00; (IPC1-7): G01N27/12; H01L49/00