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Title:
COMPOSITION AND METHOD FOR DEPOSITING CARBON DOPED SILICON-CONTAINING FILM
Document Type and Number:
Japanese Patent JP2017082333
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a composition for depositing a carbon doped silicon-containing film.SOLUTION: A composition contains: organic aminoalkylsilane having formula RSi(NRR)H(where x=1, 2, 3); organic alkoxyalkylsilane having formula RSi(OR)H(where x=1, 2, 3); organic aminosilane having formula RN(SiR(NRR)H); organic aminosilane having formula RN(SiRLH); a first precursor including at least one compound selected from the group thereof; and an optional second precursor including a compound having formula Si(NRR)H. Further, a method for depositing a carbon doped silicone-containing film using said composition is described in the present specification, and the method is selected out of cyclic chemical vapor deposition (CCVD), atomic layer deposition (ALD), and plasma ALD (PEALD).SELECTED DRAWING: Figure 1

Inventors:
XIAO MANCHAO
LEI XINJIAN
PEARLSTEIN RONALD MARTIN
HAIRPIN CHANDRA
KARWACKI EUGENE JOSEPH JR
HAN BING
MARC O'NEAL LEONARD
Application Number:
JP2016227697A
Publication Date:
May 18, 2017
Filing Date:
November 24, 2016
Export Citation:
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Assignee:
AIR PROD & CHEM
International Classes:
C23C16/42; C23C16/455; H01L21/318
Domestic Patent References:
JP2004529495A2004-09-24
JP2010530127A2010-09-02
JP2010183069A2010-08-19
JP2004103688A2004-04-02
Foreign References:
WO2006101027A12006-09-28
US5424095A1995-06-13
US5888662A1999-03-30
Other References:
ARKLES B: "SILICON NITRIDE FROM ORGANOSILAZANE CYCLIC AND LINEAR PREPOLYMERS", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. V133 N1, JPN5014007344, January 1986 (1986-01-01), US, pages 233 - 234, ISSN: 0003726949
ERIC BACQUE: "SYNTHESIS AND CHEMICAL PROPERTIES OF 1,3-DICHLORO-1,3-DIHYDRIDODISILAZANES", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. V481, JPN5014007346, 1 January 1994 (1994-01-01), pages 167 - 172, XP055043403, ISSN: 0003726950, DOI: 10.1016/0022-328X(94)85021-6
HOLGER FLEISCHER: "GAS-PHASE MOLECULAR STRUCTURES OF BIS(CHLOROMETHYLSILYL)AMINE 以下備考", JOURNAL OF THE CHEMICAL SOCIETY, vol. N4, JPN5014007345, 1 January 1998 (1998-01-01), pages 593 - 600, XP055043355, ISSN: 0003726951, DOI: 10.1039/a708219c
Attorney, Agent or Firm:
Aoki Atsushi
Ishida Kei
Tetsuji Koga
Satoshi Deno
Nobuo Sekine
Kazuya Shiokawa



 
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