Title:
化合物、有機膜組成物、有機膜、およびパターン形成方法
Document Type and Number:
Japanese Patent JP6813288
Kind Code:
B2
Abstract:
The present invention relates to a monomer represented by chemical formula 1, an organic layer composition comprising the monomer, an organic layer prepared from the organic layer composition, and to a method for forming a pattern using the organic layer composition. The definition of the chemical formula 1 is the same as in the specification.
Inventors:
Takashi Saku
Ginger good grace
Nannomiya
南 ▲えん▼ 希
Xu Yanagi beauty
Kim Yong Bottle
Shun Bun
Ginger good grace
Nannomiya
南 ▲えん▼ 希
Xu Yanagi beauty
Kim Yong Bottle
Shun Bun
Application Number:
JP2016119307A
Publication Date:
January 13, 2021
Filing Date:
June 15, 2016
Export Citation:
Assignee:
SAMSUNG SDI Co., LTD.
International Classes:
C07D209/12; C07D209/58; C07D209/86; C07D311/82; C07D333/54; C07D333/56; C08G12/26; G03F7/11; G03F7/16; G03F7/26; H01L21/027
Domestic Patent References:
| JP1085975A | ||||
| JP53055222A |
Foreign References:
| US20060142562 | ||||
| WO2004076461A1 | ||||
| WO2009031602A1 | ||||
| US20150001178 | ||||
| US20140183701 |
Other References:
Journal of Organic Chemistry,1999年,64(21),7890-7901
Attorney, Agent or Firm:
Hatta International Patent Corporation