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Title:
CONDUCTIVE THIN FILM
Document Type and Number:
Japanese Patent JPH06103817
Kind Code:
A
Abstract:

PURPOSE: To provide a transparent conductive film, whose specific resistance is 1×10-4Ωcm or less, at temperature of 200°C or less by constituting the film of a plurality of layers having different carrier concentration.

CONSTITUTION: Layers having higher conduction carrier concentration and layers having lower conduction carrier concentration are alternately laminated so as to form a thin film, which comprises at least one kind of cation and oxygen with transmittance of 85% or higher to a visible ray and has conductivity. In this case, the thickness of the layer having higher conduction carrier concentration is designed to be 20nm or less equivalent to the order of wave length of an electron, with its concentration of 5×1020cm-3 or higher. Accordingly, electrons becomes two dimensional electron gas (2DEG) state so that they have higher mobility compared with usual three dimensional state, resulting in higher conductivity and lower resistivity of the laminated film.


Inventors:
ONO TOSHIYUKI
CHIYABARA KENICHI
KOZONO YUZO
Application Number:
JP1992000247612
Publication Date:
April 15, 1994
Filing Date:
September 17, 1992
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G02F1/1343; H01B5/14; (IPC1-7): H01B5/14; G02F1/1343
Attorney, Agent or Firm:
小川 勝男