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Title:
CONTINUOUS VACUUM VAPOR DEPOSITION SYSTEM
Document Type and Number:
Japanese Patent JPH10183346
Kind Code:
A
Abstract:

To efficiently recover ineffectively deposited matter.

This continuous vacuum vapor deposition system has a continuously traveling belt-like substrate 1, a crucible 2 housing a dissolved evaporation material 5, an evaporation material supply device 9 which supplies the evaporation material 5 to the crucible 2 and a vacuum chamber 6 in which the substrate and the crucible are built and which is evacuated and deposits the evaporation material evaporated by heating and evaporating the evaporation material in the crucible on the surface of the substrate by evaporation. In such a case, the evaporation material supply device is so constituted that the evaporation material is formed to a sheet form and that the sheet 7 is suspended toward the lateral side of the crucible from the lateral side of the substrate and is fed into the crucible from the bottom end. The ineffectively deposited matter released the lateral side of the substrate is thus adhered to the sheet and is recovered.


Inventors:
KAWAGUCHI NORIHITO
TAKASHIMA KOJI
SHINOHARA JOSHI
Application Number:
JP34741496A
Publication Date:
July 14, 1998
Filing Date:
December 26, 1996
Export Citation:
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Assignee:
ISHIKAWAJIMA HARIMA HEAVY IND
International Classes:
C23C14/24; C23C14/56; (IPC1-7): C23C14/56; C23C14/24
Attorney, Agent or Firm:
Minoru Hotta (1 person outside)