Title:
CONVEYANCE DEVICE
Document Type and Number:
Japanese Patent JP2011111289
Kind Code:
A
Abstract:
To provide a conveyance device capable of maintaining the posture of a cassette in an appropriate state even in the process of conveying a cassette.
The conveyance device includes: a first conveyance table 110 and a second conveyance table 111; a sensor capable of detecting a distance from a first side surface of the cassette 200; and a control section 260 for adjusting the rotation speeds of a first roller and a second roller based on the output from the sensor.
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Inventors:
ESASHI NOBORU
Application Number:
JP2009269580A
Publication Date:
June 09, 2011
Filing Date:
November 27, 2009
Export Citation:
Assignee:
SHARP KK
International Classes:
B65G13/06; B65G49/06; H01L21/677
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki