To provide a conveying device for a flat plate-like base for horizontally conveying a flat plate-like base with one surface of the base member facing upward capable of preventing scores from occurring on the surface of the base by conveying when the flat plate-like base to be conveyed is a product having one or more functional layers disposed on one surface of the flat plate-like base or an intermediate treatment member for manufacturing the product.
This conveying device comprises a plurality of shafts and a plurality of support parts secured to the shafts, rotated when the shafts are rotated, and supporting a flat plate-like base by the other surface of the base member. The support part comprises a roller-like pedestal part for mounting it on the shaft and a brush-like part formed of a plurality of linear members secured to the pedestal part and so disposed on the outer peripheral part as to project from the outer peripheral part in the direction perpendicular to the shaft over the entire outer periphery. The support part supports the flat plate-like base by the brush-like part, and conveys the flat plate-like base by its rotation.
MIYAZAKI TORU
TSUCHIYA KOJI
UCHIDA MASAYUKI
HATAYAMA RYOTA
ICHISE TAKEHIKO
| JPH07277411A | 1995-10-24 | |||
| JP2004299850A | 2004-10-28 | |||
| JP2002096038A | 2002-04-02 |
Keiko Fukamachi
Hideo Ito
Hiromi Fujimasu
Naoki Goto