Title:
CRYSTAL PULLING-UP APPARATUS
Document Type and Number:
Japanese Patent JPH03285893
Kind Code:
A
Abstract:
PURPOSE:To safely and surely pull up a single crystal of large diameter by forming a constricted part when a single crystal is grown, and grasping the constricted part by a grasping means to pull up and grow the single crystal. CONSTITUTION:A seed holder 14 is lowered by a pulling-up means 22 to dip a seed crystal 16 into the molten liquid 24 in a quartz crucible 12 to grow the crystal of neck part 26. Then, the pulling-up speed is adjusted to grow an enlarging part 28, a constricted part 30, and a cone part 34, and an engaging stage part 32 is formed. When the engaging stage part 32 is formed, wires 42 are loosened by motors 44 to lower a movable member 36 and grasping levers 39, and a ring 40 is also lowered along the grasping levers 39. Consequently, when the claws 38 of the grasping levers 39 are located at the engaging stage part 32 and the wires 42 are given tension by the motors 44, the claws 38 are engaged with the engaging stage part 32. Then, the pulling-up means 22 and the supporting means 20 are synchronously pulled up to grow the single crystal 18. By this method, a heavy single crystal of large diameter is safely pulled up.
Inventors:
YAMAGISHI HIROTOSHI
MIZUISHI KOJI
MIZUISHI KOJI
Application Number:
JP8698990A
Publication Date:
December 17, 1991
Filing Date:
March 30, 1990
Export Citation:
Assignee:
SHINETSU HANDOTAI KK
International Classes:
C30B15/32; C30B15/30; C30B29/06; H01L21/208; (IPC1-7): C30B15/32; C30B29/06; H01L21/208
Domestic Patent References:
| JPS62288191A | 1987-12-15 | |||
| JPS55167200A | 1980-12-26 |
Attorney, Agent or Firm:
Shoji Ishihara