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Patent Searching and Data


Title:
CURABLE COMPOSITION FOR IMPRINT, FILM AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2018125560
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a curable composition which is high in speed of filling a mold and which enables the achievement of a film superior in the easiness of mold release.SOLUTION: A curable composition for imprint includes: a polymerization initiator; a radical polymerizable compound; and an internal type mold-release agent having a hydrophilic functional group. The internal type mold-release agent is a compound represented by the general formula (A) below, and is not unevenly distributed at a gas-liquid interface of the curable composition. The internal type mold release agent is not unevenly distributed at a gas-liquid interface of the curable composition, and has better affinity to water than the polymerizable compound that is a main component of the curable composition. R-(OR')-X (A) (In the formula (A), R represents an alkyl group with 10-20 carbon atoms, OR' represents an oxyethylene group, X represents a hydroxyl group, and n represents an integer of 3 to 30.)SELECTED DRAWING: None

Inventors:
YONEZAWA SHIORI
KITAGAWA KENJI
ITO TOSHIKI
KAWASAKI YOJI
Application Number:
JP2018078123A
Publication Date:
August 09, 2018
Filing Date:
April 16, 2018
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; B29C59/02; C08F2/44; C08F2/48
Attorney, Agent or Firm:
Yoshihiro Yamaguchi
Keisuke Watanabe