Title:
CURRENT TRANSFORMER, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2017199795
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a current transformer.SOLUTION: A current transformer according to the embodiment, comprises: a rotation axis; a first coil; a second coil; and a third coil. The rotation axis is constructed so as to rotate a center axial line as a rotation axial line. The first coil is a primary coil, and is extended to a first axial circumference orthogonal to the center axial line of the rotation axis. The second coil is a secondary line, is extended to a second axial circumference, and is supported by the rotation axis. The second axial line is orthogonal to the center axial line of the rotation axis in a region to be surrounded by the first coil. The third coil is the secondary coil, is extended to a third axial circumference, and is supported by the rotation axis. The third axial line is orthogonal to the center axial line of the rotation axis in the region surrounded by the first coil, and forms a predetermined angle with the second axial line.SELECTED DRAWING: Figure 1
Inventors:
YAMAZAWA YOHEI
Application Number:
JP2016089389A
Publication Date:
November 02, 2017
Filing Date:
April 27, 2016
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01F30/04; H01F27/28; H01F29/12; H01F30/08; H01F30/10; H05H1/46
Domestic Patent References:
| JPH08327311A | 1996-12-13 | |||
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Foreign References:
| WO2009020129A1 | 2009-02-12 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashiwaoka
Yoshiki Kuroki
Junji Kashiwaoka