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Patent Searching and Data


Title:
DEFECT INSPECTING DEVICE
Document Type and Number:
Japanese Patent JPS61245007
Kind Code:
A
Abstract:

PURPOSE: To execute quickly and with high accuracy an inspection of a defect by deciding in detail a defect candidate which has been extracted by the first means, by the second means.

CONSTITUTION: An input image pattern is supplied to a defect roughly extracting part 4 through an image input device 2, and A/D converter 3, image patterns of the corresponding parts of two bodies to be inspected are compared, and a defect candidate is extracted roughly. When the rough extraction processing is repeated by a prescribed number of times, and no defect candidate is detected at all, the inspection is ended. On the contrary, if the defect candidate is detected even once, a position where the defect candidate has been generated is stored by a position detecting circuit 5. Subsequently, by a defect minutely extracting part 6, and a feature extracting and comparing circuit 7, only the defect candidate of the position stored before hand is brought to a minute decision processing. In this way, even if the minute decision processing is not executed to all the input image patterns, an inspection of a defect based on the input image pattern can be executed quickly and with a high accuracy.


Inventors:
OBATA OSAMU
EJIRI MASAKAZU
YODA HARUO
SAKAWA YUTAKA
SAKAMOTO YUZABURO
Application Number:
JP1985000086382
Publication Date:
October 31, 1986
Filing Date:
April 24, 1985
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01N21/88; G01B11/24; G01B11/30; G01N21/93; G01N21/956; G06T1/00; H01L21/66; H04N7/18; (IPC1-7): G01B11/30; G01N21/88; G06K9/00; H01L21/66; H04N7/18