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Title:
DICING APPARATUS, BLADE DIAGNOSIS APPARATUS, BLADE DIAGNOSIS METHOD AND PROGRAM
Document Type and Number:
Japanese Patent JP2017164843
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a dicing apparatus, a blade diagnosis apparatus, a blade diagnosis method and a program that calculate a tip shape of a blade for diagnosis of the blade.SOLUTION: A blade diagnosis method comprises: a groove formation step for rotating a disk-shaped blade and bringing a tip of the blade into contact with a flat plate work so as to form a groove in the work; an image obtaining step for obtaining a plan view image of the formed groove; a measurement step for measuring a size of the groove from the obtained image; a calculation step for calculating a tip shape of the blade from the measured size; and an output step for outputting information relating to the calculated tip shape.SELECTED DRAWING: Figure 4

Inventors:
KINJO YUSUKE
Application Number:
JP2016051840A
Publication Date:
September 21, 2017
Filing Date:
March 16, 2016
Export Citation:
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Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B24B49/12; B24B27/06; H01L21/301
Domestic Patent References:
JP2010240776A2010-10-28
JP2010240776A2010-10-28
Attorney, Agent or Firm:
松浦 憲三