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Patent Searching and Data


Title:
DISK SUBSTRATE PROCESSING DEVICE AND STATION CONNECTED TO THE SAME
Document Type and Number:
Japanese Patent JPH1029724
Kind Code:
A
Abstract:

To increase/decrease the number of stations with a simple method by composing each station of a plate interposed continuously between two side walls and the side walls and moving a transport mechanism among various stations on a guiding means.

In a second station 2 for loading/unloading, a substrate to be processed or machined comes into and out from a device 1. In second and third stations for processing, for example, a photoresist is formed on the substrate and this is subjecting to processing step. Each of stations 2, 3 and 4 is composed of left and right side walls, and a rod 14 forms a guiding means for a transport mechanism. One side of a measuring device 18 is connected to the conveying mechanism and its other side is connected to a measuring drum installed in the measuring device 18. The conveying mechanism moves on the rod 14 among the stations 2, 3 and 4. A substrate 10 is continuously moved by the conveying mechanism.


Inventors:
BOER JACOB DE
HAMMING MARTIN
GOUDSMITS PETRUS JOHANNES MARI
Application Number:
JP9245497A
Publication Date:
February 03, 1998
Filing Date:
April 10, 1997
Export Citation:
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Assignee:
ODME INTERNATL BV
International Classes:
B65G49/06; B23Q7/04; B29D17/00; B65G49/07; G11B7/26; (IPC1-7): B65G49/06; G11B7/26
Attorney, Agent or Firm:
石田 敬 (外3名)